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About this scholarly article
Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization by Vepřek, Stanislav; Venugopalan, Mundiyath is a scholarly article available to read on EtoBox.
- Author
- Vepřek, Stanislav; Venugopalan, Mundiyath
- Publisher
- Springer-Verlag
- Published
- 1980
- Language
- EN
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