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About this Engineering article
VUV-Assisted Etching of Silicon (100) and Poly(methyl methacrylate) by Ueno, Nobuo; Mitsuhata, Tsuneo; Sugita, Kazuyuki; Tanaka, Kenichiro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ueno, Nobuo; Mitsuhata, Tsuneo; Sugita, Kazuyuki; Tanaka, Kenichiro
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1988
- Field
- Engineering (Physical Sciences)