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About this Engineering article
Numerical simulation of thermal distortions in deep and ultra deep X-ray lithography by S. Achenbach; F. J. Pantenburg; J. Mohr is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- S. Achenbach; F. J. Pantenburg; J. Mohr
- Publisher
- Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 0946-7076)
- Published
- 2003
- Field
- Engineering (Physical Sciences)