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About this Engineering article
Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering by Azhan, Nurul Hanis; Okimura, Kunio; Matsuoka, Kohei; Zaghrioui, Mustapha; Sakai, Joe is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Azhan, Nurul Hanis; Okimura, Kunio; Matsuoka, Kohei; Zaghrioui, Mustapha; Sakai, Joe
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)