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About this Materials Science article
Combined Atomic Layer and Chemical Vapor Deposition, and Selective Growth of Ge 2 Sb 2 Te 5 Films on TiN/W Contact Plug by Choi, Byung Joon; Choi, Seol; Shin, Yong Cheol; Kim, Kyung Min; Hwang, Cheol Seong; Kim, Yoon Jung; Son, Young Jin; Hong, Suk Kyoung is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Choi, Byung Joon; Choi, Seol; Shin, Yong Cheol; Kim, Kyung Min; Hwang, Cheol Seong; Kim, Yoon Jung; Son, Young Jin; Hong, Suk Kyoung
- Publisher
- American Chemical Society; American Chemical Society (ACS) (ISSN 0897-4756)
- Published
- 2007
- Language
- EN
- Field
- Materials Science (Physical Sciences)