About this scholarly article

Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - A low-voltage force-balanced pressure sensor with hermetically sealed servomechanism by Gogoi, B.P.; Mastrangelo, C.H. is a scholarly article available to read on EtoBox.

Author

Gogoi, B.P.; Mastrangelo, C.H.

Publisher

IEEE

Published

1999

Language

EN