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Sputter Epitaxial Growth of Flat Germanium Film with Low Threading-Dislocation Density on Silicon by Yeh, W.; Matsumoto, A.; Sugihara, K.; Hayase, H. is a Engineering article available to read on EtoBox.

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Author
Yeh, W.; Matsumoto, A.; Sugihara, K.; Hayase, H.
Publisher
The Electrochemical Society; Electrochemical Society, Inc. (ISSN 2162-8769)
Published
2014
Field
Engineering (Physical Sciences)

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