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Ferroelectric-on-Si Super-High-Frequency Fin Bulk Acoustic Resonators With Hf0.5Zr0.5O2 Nanolaminated Transducers by Hakim, Faysal (author);Tharpe, Troy (author);Tabrizian, Roozbeh (author) is a Engineering article available to read on EtoBox.
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- Author
- Hakim, Faysal (author);Tharpe, Troy (author);Tabrizian, Roozbeh (author)
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Published
- 2021
- Language
- EN
- Field
- Engineering (Physical Sciences)
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