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Understanding Plasma Basics and Applications by Maureen Kae Atractivo Subala is a document available to read on EtoBox.
What is Understanding Plasma Basics and Applications about?
The document discusses plasma basics and processes. It describes that plasma is an ionized gas containing equal numbers of positive and negative charges. It lists applications of plasma like CVD, etch, PVD, and dry cleaning. Key topics covered include the components of plasma, ionization rate, excitation and relaxation processes, and dissociation reactions. Mean free path is defined as the average distance traveled between particle collisions. Higher pressure results in shorter mean free path.
- Author
- Maureen Kae Atractivo Subala
- Language
- EN