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About this Engineering article
Novel Surface-Wave-Excited PE-CVD System with Reciprocated Substrate Ambulation Mechanism by Kazufumi Azuma; Satoko Ueno; Masayasu Suzuki; Yoshiyuki Konishi; Shinichiro Ishida is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kazufumi Azuma; Satoko Ueno; Masayasu Suzuki; Yoshiyuki Konishi; Shinichiro Ishida
- Publisher
- The Electrochemical Society (ISSN 2151-2043)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)