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Systematic studies of SiGe/Si islands nucleated via separate in situ, or ex situ, Ga+ focused ion beam-guided growth techniques by Vandervelde, T. E.; Atha, S.; Pernell, T. L.; Hull, R.; Bean, J.C. is a Engineering article available to read on EtoBox.

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Author
Vandervelde, T. E.; Atha, S.; Pernell, T. L.; Hull, R.; Bean, J.C.
Publisher
Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
Published
2003
Language
EN
Field
Engineering (Physical Sciences)

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