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About this Engineering article
Comparison of phosphorus, arsenic and boron implants into bulk silicon and SOS : Kostas Amberiadis, Michael R. Kump and Charles W. Magee. Solid-St. Electron.33(6), 651 (1990) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1992
- Field
- Engineering (Physical Sciences)