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Microstructure and optical properties of amorphous TiO2-SiO2 composite films synthesized by helicon plasma sputtering by Xinrong Wang; Hiroshi Masumoto; Yoshihiro Someno; Toshio Hirai is a Engineering article available to read on EtoBox.

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Composite ®lms of TiO 2 ±SiO 2 have been deposited on Si(100) wafers and glass (BK7) substrates by helicon plasma sputtering at room temperature. The results of X-ray diffraction and high resolution transmission electron microscopic observation showed that all of the composite ®lms have an amorphous structure. The observation of scanning electron microscopy exhibited that the surfaces of all of the composite ®lms have dense smooth morphology. The refractive index and the transmittance of the composite ®lms varied gradually in the whole composition range of the TiO 2 ±SiO 2 binary system. TiO 2 ±SiO 2 composite ®lms exhibited a transmittance of more than 90% compared with that of the glass (BK7) substrate. The relationship between refractive index and TiO 2 content for the composite ®lms can be described using the Lorentz±Lorenz model

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Author

Xinrong Wang; Hiroshi Masumoto; Yoshihiro Someno; Toshio Hirai

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

1999

Language

EN

Field

Engineering (Physical Sciences)