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About this Engineering article
Effect of Process Parameters on Friction Force and Material Removal in Oxide Chemical Mechanical Polishing by Park, Boumyoung; Lee, Hyunseop; Kim, Youngjin; Kim, Hyoungjae; Jeong, Haedo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Park, Boumyoung; Lee, Hyunseop; Kim, Youngjin; Kim, Hyoungjae; Jeong, Haedo
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)
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