About this Engineering article
Dry Processing of Thin Film Capacitors Arrays Using Ion Beam Assisted Deposition by Ari Ide-Ektessabi; Hiroki Uehara; Susumu Kamitani is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ari Ide-Ektessabi; Hiroki Uehara; Susumu Kamitani
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)