About this scholarly article

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Nano- and Micro-Metrology - Analytical model of a double grating system with partial temporal and spatial coherence by Sanchez-Brea, Luis Miguel; Alonso, Jose; Saez-Landete, Jose Bienvenido; Bernabeu, Eusebio; Ottevaere, Heidi; DeWolf, Peter; Wiersma, Diederik S. is a scholarly article available to read on EtoBox.

Author

Sanchez-Brea, Luis Miguel; Alonso, Jose; Saez-Landete, Jose Bienvenido; Bernabeu, Eusebio; Ottevaere, Heidi; DeWolf, Peter; Wiersma, Diederik S.

Publisher

SPIE

Published

2005

Language

EN