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About this Physics and Astronomy article
Theoretical Study of the Chemical Vapor Deposition of (100) Silicon from Silane by Ku Kang, Jeung; Musgrave, Charles B. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Ku Kang, Jeung; Musgrave, Charles B.
- Publisher
- The American Physical Society; American Physical Society; Springer Verlag; American Physical Society (APS) (ISSN 1098-0121)
- Published
- 2001
- Field
- Physics and Astronomy (Physical Sciences)