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About this Engineering article
Development of geometrically based fabrication emulator for MEMS micromachining and excimer laser ablation by Chen, Kuo‐Shen; Yeh, Hsiu‐Ming is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chen, Kuo‐Shen; Yeh, Hsiu‐Ming
- Publisher
- Chinese Electronic Periodical Services; Informa UK (Taylor & Francis); Taylor & Francis; Informa UK Limited (ISSN 0253-3839)
- Published
- 2008
- Field
- Engineering (Physical Sciences)