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About this Engineering article

Reduction of Annealed-induced Wafer Defects in Dual-damascene Copper Interconnects by Y. Abdul Wahab; A.F. Ahmad; H. Hussin; N. Soin is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Y. Abdul Wahab; A.F. Ahmad; H. Hussin; N. Soin
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
Published
2012
Field
Engineering (Physical Sciences)

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