About this document
Nonlinear Model for MEMS Pressure Sensor by Hubing Wang is a document available to read on EtoBox.
This paper presents a geometrically nonlinear numerical model for designing a MEMS-based piezoresistive pressure sensor tailored for low-pressure applications. The sensor features a bossed-diaphragm structure and is characterized through numerical simulations that account for temperature and doping concentration effects, achieving a full-scale output of 2.2 µV/V/Pa with minimal linear error. The study emphasizes the importance of accurate modeling to improve sensor performance in low-pressure environments.
- Author
- Hubing Wang
- Language
- EN