Can I read Ultra-high-speed High-resolution Laser Lithography for Lithium Niobate Integrated Photonics on EtoBox?

Ultra-high-speed High-resolution Laser Lithography for Lithium Niobate Integrated Photonics by Chen, Jinming; Liu, Zhaoxiang; Song, Lvbin; Sun, Chao; Wang, Guanhua; Cheng, Ya is a scholarly article available to read on EtoBox.

What is Ultra-high-speed High-resolution Laser Lithography for Lithium Niobate Integrated Photonics about?

Photolithography assisted chemo-mechanical etching (PLACE), a technique specifically developed for fabricating highquality large-scale photonic integrated circuits (PICs) on thin-film lithium niobate (TFLN), has enabled fabrication of a series of building blocks of PICs ranging from high-quality (high-Q) microresonators and low-loss waveguides to electrooptically (EO) tunable lasers and waveguide amplifiers. Aiming at high-throughput manufacturing of the PIC devices and systems, we have developed an ultra-high-speed high-resolution laser lithography fabrication system employing a high repetition rate femtosecond laser and a high-speed polygon laser scanner, by which a lithography fabrication efficiency of 4.8 cm2/h has been achieved at a spatial resolution of 200 nm. We demonstrate wafer-scale fabrication of TFLN-based photonic structures, optical phase masks as well as color printing

Author

Chen, Jinming; Liu, Zhaoxiang; Song, Lvbin; Sun, Chao; Wang, Guanhua; Cheng, Ya

Published

2023

Language

EN