Opening book details…
About this Engineering article
The Measurement of the Thickness of Thin SiC Layers on Silicon by Cimalla, Volker; Scheiner, J.; Ecke, Gernot; Friedrich, M.; Goldhahn, R.; Zahn, D.R.T.; Pezoldt, Jörg is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Cimalla, Volker; Scheiner, J.; Ecke, Gernot; Friedrich, M.; Goldhahn, R.; Zahn, D.R.T.; Pezoldt, Jörg
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 1998
- Field
- Engineering (Physical Sciences)