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Comparison of diamond-like carbon films deposited from 40 kHz and 13.56 MHz r.f. plasmas by Donnelly, K.; Dowling, D.P.; O'Brien, T.P.; O'Leary, A.; Kelly, T.C.Z is a Materials Science article available to read on EtoBox.

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Author
Donnelly, K.; Dowling, D.P.; O'Brien, T.P.; O'Leary, A.; Kelly, T.C.Z
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0925-9635)
Published
1996
Field
Materials Science (Physical Sciences)

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