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Background removal in AES; influence of detection geometrical characteristics by N. Rosenberg; M. Tholomier; E. Vicario is a Engineering article available to read on EtoBox.

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## Abstract In order to remove the inelastic background from Auger spectra, we took advantage of theoretical work assuming an experimental arrangement corresponding to cylindrical symmetry. The knowledge of the inelastic differential cross‐section __K__(__T__) is necessary for the background calculation (__T__ is the energy loss), so we calculated __K__(__T__) from back‐scattering spectra experimentally obtained using either a cylindrical mirror analyzer (cylindrical symmetry) or a hemispherical mirror analyzer (no cylindrical symmetry). The strict application of theoretical expressions may eventually lead to a __K__(__T__) function with some negative part, i. e. without physical meaning. We have interpreted this effect and we consequently succeeded in eliminating any negative part. In setting out the Auger spectra background, we took into account secondary electrons created by Auger electrons by introducing distinct laws for the spectra from the two analysers. ‘Intrinsic’ Auger spectra, obtained from elemental materials (Si, Ag, Ni, Cu) andregistered from either analyzer, were compared. Some minor differences remain, according to which analyzer is used.

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Author
N. Rosenberg; M. Tholomier; E. Vicario
Publisher
John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Inc.; Wiley; Research Square (ISSN 0142-2421)
Published
1991
Language
EN
Field
Engineering (Physical Sciences)

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