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About this Engineering article
Field emission induced-damage in the actuation paths of MEMS capacitive structures by Theocharis, J.; Koutsoureli, M.; Gardelis, S.; Konstantinidis, G.; Papaioannou, G. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Theocharis, J.; Koutsoureli, M.; Gardelis, S.; Konstantinidis, G.; Papaioannou, G.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 2020
- Field
- Engineering (Physical Sciences)