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About this Engineering article
Photon counting method for measuring the current fraction in D22+−He+ mixed ion sputtering by Akatsuka Hiroshi; Takami Makito; Hirabayashi Naoto; Sakisaka Masakatsu; Tomita Michio is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Akatsuka Hiroshi; Takami Makito; Hirabayashi Naoto; Sakisaka Masakatsu; Tomita Michio
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 1988
- Language
- EN
- Field
- Engineering (Physical Sciences)