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About this Engineering article
In-situ Prediction of Reactive Ion Etch Endpoint Using Neural Networks by M. Baker; C. Himmel; G. May is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- M. Baker; C. Himmel; G. May
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1070-9886)
- Published
- 1995
- Language
- EN
- Field
- Engineering (Physical Sciences)