About this scholarly article

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Optical actuation of silicon cantilevers: modelling and experimental investigation by Jiang, Fei; Keating, Adrian; Martyuink, Mariusz; Silva, Dilusha; Faraone, Lorenzo; Dell, John M.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika is a scholarly article available to read on EtoBox.

Author

Jiang, Fei; Keating, Adrian; Martyuink, Mariusz; Silva, Dilusha; Faraone, Lorenzo; Dell, John M.; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Publisher

SPIE

Published

2013