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About this Engineering article
Polycrystalline Silicon Micromechanical Beams by R. T. Howe; R. S. Muller is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- R. T. Howe; R. S. Muller
- Published
- 1983
- Field
- Engineering (Physical Sciences)