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About this Engineering article
Rapid thermal annealing of Si-implanted GaAs with trimethylarsenic overpressure by Reynolds, S.; Vook, D. W.; Opyd, W. G.; Gibbons, J. F. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Reynolds, S.; Vook, D. W.; Opyd, W. G.; Gibbons, J. F.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1987
- Language
- EN
- Field
- Engineering (Physical Sciences)
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