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About this Engineering article
Fabrication of SiC Nanopillars by Inductively Coupled SF6/O2 Plasma by Choi, Ji Hoon; Latu-Romain, Laurence; Dhalluin, Florian; Chevolleau, Thierry; Salem, Bassem; Baron, Thierry; Chaussende, Didier; Bano, Edwige is a Engineering article available to read on EtoBox.
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- Author
- Choi, Ji Hoon; Latu-Romain, Laurence; Dhalluin, Florian; Chevolleau, Thierry; Salem, Bassem; Baron, Thierry; Chaussende, Didier; Bano, Edwige
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)