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Thermostability of Amorphous Zirconium Aluminate High-k Layers by C. Zhao; O. Richard; E. Young; H. Bender; G. Roebben; S. Haukka; S. De Gendt; M. Houssa; R. Carter; W. Tsai; O. Van Der Biest; M. Heyns is a Materials Science article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Materials Science.

Author
C. Zhao; O. Richard; E. Young; H. Bender; G. Roebben; S. Haukka; S. De Gendt; M. Houssa; R. Carter; W. Tsai; O. Van Der Biest; M. Heyns
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-3093)
Published
2002
Language
EN
Field
Materials Science (Physical Sciences)

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Browse all works by C. Zhao; O. Richard; E. Young; H. Bender; G. Roebben; S. Haukka; S. De Gendt; M. Houssa; R. Carter; W. Tsai; O. Van Der Biest; M. Heyns