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About this Chemistry article
ChemInform Abstract: Reactive Ion Etching of Aluminum/Silicon in BBr3/Cl2 and BCl3/Cl2 Mixtures by BELL, H. B.; ANDERSON, H. M.; LIGHT, R. W. is a Chemistry article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Chemistry.
- Author
- BELL, H. B.; ANDERSON, H. M.; LIGHT, R. W.
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); Wiley (ISSN 0931-7597)
- Published
- 1988
- Field
- Chemistry (Physical Sciences)
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