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About this Engineering article
Formation of Thin Oxide Films on Room-Temperature Silicon (100) by Exposure to a Neutral Beam of Hyperthermal Atomic and Molecular Oxygen by Tagawa, Masahito; Ema, Tatsuhiko; Kinoshita, Hiroshi; Ohmae, Nobuo; Umeno, Masataka; Minton, Timothy K. is a Engineering article available to read on EtoBox.
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- Author
- Tagawa, Masahito; Ema, Tatsuhiko; Kinoshita, Hiroshi; Ohmae, Nobuo; Umeno, Masataka; Minton, Timothy K.
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1998
- Field
- Engineering (Physical Sciences)