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About this Physics and Astronomy article
The effects of He plasma interactions with SiH4 in remote plasma enhanced chemical vapor deposition by Theil, Jeremy A.; Powell, Gary is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Theil, Jeremy A.; Powell, Gary
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 1994
- Field
- Physics and Astronomy (Physical Sciences)