About this scholarly article

2009 IEEE Sensors - Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments by Babaei Gavan, Khashayar; van der Heijden, Joost; van der Drift, Emile; van der Zant, Herre is a scholarly article available to read on EtoBox.

Author

Babaei Gavan, Khashayar; van der Heijden, Joost; van der Drift, Emile; van der Zant, Herre

Publisher

IEEE

Published

2009