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About this Engineering article
Degree of dissociation measured by FTIR absorption spectroscopy applied to VHF silane plasmas by Sansonnens, L; Howling, A A; Hollenstein, Ch is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sansonnens, L; Howling, A A; Hollenstein, Ch
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0963-0252)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)
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