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About this Chemistry article

ChemInform Abstract: Crystallinity of Inorganic Films Grown by Atomic Layer Deposition: Overview and General Trends by Miikkulainen, Ville; Leskela, Markku; Ritala, Mikko; Puurunen, Riikka L. is a Chemistry article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Chemistry.

Author
Miikkulainen, Ville; Leskela, Markku; Ritala, Mikko; Puurunen, Riikka L.
Publisher
John Wiley and Sons; Wiley (John Wiley & Sons); Wiley (ISSN 0931-7597)
Published
2013
Field
Chemistry (Physical Sciences)

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