About this scholarly article

2011 Academic International Symposium on Optoelectronics and Microelectronics Technology - Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source by Zhu, Qiushi; Yamada, Junzaburo; Kishi, Nozomu; Hosokai, Tomonao; Watanabe, Masato; Okino, Akitoshi; Horioka, Kazuhiko; Hotta, Eiki is a scholarly article available to read on EtoBox.

Author

Zhu, Qiushi; Yamada, Junzaburo; Kishi, Nozomu; Hosokai, Tomonao; Watanabe, Masato; Okino, Akitoshi; Horioka, Kazuhiko; Hotta, Eiki

Publisher

IEEE

Published

2011