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High-Temperature Heat-Treatment of c -, a -, r -, and m -Plane Sapphire Substrates in Mixed Gases of H 2 and N 2 by Nomura, Kazushiro; Hanagata, Shoko; Kunisaki, Atsushi; Togashi, Rie; Murakami, Hisashi; Kumagai, Yoshinao; Koukitu, Akinori is a Engineering article available to read on EtoBox.

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Author
Nomura, Kazushiro; Hanagata, Shoko; Kunisaki, Atsushi; Togashi, Rie; Murakami, Hisashi; Kumagai, Yoshinao; Koukitu, Akinori
Publisher
Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
Published
2013
Language
EN
Field
Engineering (Physical Sciences)