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About this Engineering article

Proton implantation for isolation of n-type GaAs layers at different substrate temperatures by Ahmed, S; Gwilliam, R; Sealy, B J is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Ahmed, S; Gwilliam, R; Sealy, B J
Publisher
Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0268-1242)
Published
2001
Field
Engineering (Physical Sciences)

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