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About this Engineering article
Thickness inhomogeneity during silicon X-ray mask membrane fabrication: Generation and prevention by B. Löchel; A. Macioβek; M. König; H.-L. Huber is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- B. Löchel; A. Macioβek; M. König; H.-L. Huber
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)
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