Opening book details…
About this Engineering article
Effects of Wet Chemistry Pre-gate Clean Strategies on the Organic Contamination of Gate Oxides for Metal-Oxide-Semiconductor Field Effect Transistor by J. J. Guan; G. W. Gale; J. Bennett is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. J. Guan; G. W. Gale; J. Bennett
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2000
- Field
- Engineering (Physical Sciences)