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SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Applications and Science of Neural Networks, Fuzzy Systems, and Evolutionary Computation II - Neural nets for modeling, optimization, and control in semiconductor manufacturing by Mahajan, Roop L.; Bosacchi, Bruno; Fogel, David B.; Bezdek, James C. is a scholarly article available to read on EtoBox.

Author
Mahajan, Roop L.; Bosacchi, Bruno; Fogel, David B.; Bezdek, James C.
Publisher
SPIE
Published
1999

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