About this scholarly article

SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Integrated Circuit Metrology, Inspection, and Process Control VI - Advanced wafer manufacturing control for yield improvement in the ULSI age by Yoshida, Takafumi; Hayashi, Nobuaki; Denes, Louis; Ito, Tokuhisa; Postek, Jr., Michael T. is a scholarly article available to read on EtoBox.

Author

Yoshida, Takafumi; Hayashi, Nobuaki; Denes, Louis; Ito, Tokuhisa; Postek, Jr., Michael T.

Publisher

SPIE

Published

1992