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About this Physics and Astronomy article
Deep SiC etching with RIE by M. Lazar; H. Vang; P. Brosselard; C. Raynaud; P. Cremillieu; J.-L. Leclercq; A. Descamps; S. Scharnholz; D. Planson is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- M. Lazar; H. Vang; P. Brosselard; C. Raynaud; P. Cremillieu; J.-L. Leclercq; A. Descamps; S. Scharnholz; D. Planson
- Publisher
- Elsevier Science; Elsevier ; Elsevier Inc.; Elsevier BV (ISSN 0749-6036)
- Published
- 2006
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)