Monolayer Nitridation of Si(001) Surfaces

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LanguageEN

Published2002

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Published by Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922) (2002).

Publisher: Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)

About this Engineering article

Monolayer Nitridation of Si(001) Surfaces by Morita, Yukinori; Ishida, Takao; Tokumoto, Hiroshi is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author

Morita, Yukinori; Ishida, Takao; Tokumoto, Hiroshi

Publisher

Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)

Published

2002

Language

Field

Engineering (Physical Sciences)