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About this Engineering article
High-SPL Air-coupled Piezoelectric Micromachined Ultrasonic Transducers based on 36% ScAlN Thin-film by Kusano, Yuri; Ishii, Itaru; Kamiya, Tatsuya; Teshigahara, Akihiko; Luo, Guo-Lun; Horsley, David A. is a Engineering article available to read on EtoBox.
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- Author
- Kusano, Yuri; Ishii, Itaru; Kamiya, Tatsuya; Teshigahara, Akihiko; Luo, Guo-Lun; Horsley, David A.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0885-3010)
- Published
- 2019
- Language
- EN
- Field
- Engineering (Physical Sciences)