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About this Engineering article
Scratch Nanolithography on Si Surface Using Scanning Probe Microscopy: Influence of Scanning Parameters on Groove Size by Ogino, Takumi; Nishimura, Shinya; Shirakashi, Jun-ichi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ogino, Takumi; Nishimura, Shinya; Shirakashi, Jun-ichi
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)