About this scholarly article

SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Optomechanical and Precision Instrument Design - Novel integrated silicon micromechanical/optical pressure sensor by Wen, Zhiyu; Fei, Long; Zhong, Xianxin; Li, Youli; Hatheway, Alson E. is a scholarly article available to read on EtoBox.

Author

Wen, Zhiyu; Fei, Long; Zhong, Xianxin; Li, Youli; Hatheway, Alson E.

Publisher

SPIE

Published

1995